Novel preparation method for self-powered flexible pressure sensor array

An embodiment of the invention discloses a novel preparation method for a self-powered flexible pressure sensor array. A capacitive sensor array can be formed by using crossed electrodes, and a solarcell is flexibly integrated on the sensor array; the performance of a sensor subjected to solar energy integration is basically kept unchanged; and a flexible capacitor is further added between the sensor and the solar cell. The sensor array prepared with the method disclosed by the embodiment of the invention can work normally under light illumination and detect out the pressure intensity with the minimum of 1 Pa, and has good linearity. Moreover, the method is simple in operation, relatively low in cost and suitable for large-scale production requirements. 本发明实施例公开了种新型的自供能的柔性压力传感器阵列制备方法，其可以利用交叉电极形成电容式传感器阵列，并将太阳能电池柔性化集成到传感器阵列上，集成太阳能之后的传感器性能基本保持不变，在传感器和太阳能电池中间还增加了个柔性电容器。本发明实施例的方法制备的传感器阵列可以在光照下正常工作，并且能够侦测出最小1Pa的压强，具有很好的线性度。并且该方法简单操作，成本较低，适合大规模生产化的需要。