ELECTRIC FIELD RADIATION DEVICE AND REGENERATION PROCESSING METHOD

In this invention, an emitter (3) and a target (7) are disposed face-to-face in a vacuum chamber (1), and a guard electrode (5) is provided on the outer peripheral side of an electron-generating portion (31) of the emitter (3). The guard electrode (5) is supported by a guard electrode support unit (...

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Bibliographische Detailangaben
Hauptverfasser: TATSUMI TOSHINORI, HATANAKA MICHIHIRO, TAKAHASHI DAIZO
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:In this invention, an emitter (3) and a target (7) are disposed face-to-face in a vacuum chamber (1), and a guard electrode (5) is provided on the outer peripheral side of an electron-generating portion (31) of the emitter (3). The guard electrode (5) is supported by a guard electrode support unit (6) so as to be movable in the directions of the two extremities of the vacuum chamber (1). The regeneration processing of the guard electrode (5) comprises: operating the guard electrode support unit (6) to move the guard electrode (5) toward an opening (22) (moving to a distanced position) and reach a state in which electric field radiation from the electron-generating portion (31) is suppressed; applying a voltage onto the guard electrode (5); and repeatedly performing discharging. After the regeneration processing, the guard electrode support unit (6) is operated again to move the guard electrode (5) toward an opening (21) (moving to the emitter position) and reach a state in which the electric field radiation f