FINGERPRINT SENSOR DEVICE AND METHODS THEREOF

A fingerprint sensor device includes a sensor substrate, a plurality of sensor circuits over a first surface of the sensor substrate, and a transceiver layer located over the plurality of sensor circuits and the first surface of the sensor substrate. The transceiver layer includes a piezoelectric layer and a transceiver electrode positioned over the piezoelectric layer. The piezoelectric layer andthe transceiver electrode are configured to generate one or more ultrasonic waves or to receive one or more ultrasonic waves. The fingerprint sensor device may include a cap coupled to the sensor substrate and a cavity formed between the cap and the sensor substrate. The cavity and the sensor substrate may form an acoustic barrier. 种指纹传感器器件包括传感器基板、该传感器基板的第表面之上的多个传感器电路、以及位于该多个传感器电路和该传感器基板的第表面之上的收发机层。该收发机层包括压电层以及定位在该压电层之上的收发机电极。该压电层和该收发机电极被配置成生成个或多个超声波或接收个或多个超声波。该指纹传感器器件可包括耦合至该传感器基板的盖、以及形成在该盖与该传感器基板之间的腔体。该腔体和该传感器基板可形成声屏障。