ROTARY CLAMPING DEVICE

According to one embodiment, a rotary clamping device can comprise: a base; a clamp holder capable of performing a translational motion and a rotational motion relatively to the base; a clamp, which is disposed at the clamp holder, for clamping a substrate; and a connection link for connecting the b...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JUNG JEE-HWAN, SATOU MASARU, YUYAMA AKIRA, KANG MYEONG-SEOK, CHO HYUN-WOO
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:According to one embodiment, a rotary clamping device can comprise: a base; a clamp holder capable of performing a translational motion and a rotational motion relatively to the base; a clamp, which is disposed at the clamp holder, for clamping a substrate; and a connection link for connecting the base and the clamp holder. 本发明涉及种旋转夹持装置,其包括:基座;夹持器,可对于所述基座相对地平移运动及旋转运动;夹件,配置所述夹持器中,用于夹持基板;以及链接连杆,用于链接所述基座和所述夹持器。