Artificial intelligence-based semiconductor manufacturing execution system

The invention provides an artificial intelligence-based semiconductor manufacturing execution system, which comprises a plurality of brain units, which are in one-to-one correspondence with the production line personnel and are connected according to the cascade level of the production line personne...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ZHU LEIYU, ZHU JINYI, FAN LIANGQIAO, TAN LI, YANG YONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The invention provides an artificial intelligence-based semiconductor manufacturing execution system, which comprises a plurality of brain units, which are in one-to-one correspondence with the production line personnel and are connected according to the cascade level of the production line personnel. When it is detected that the machine is in the preset working state, the corresponding operationrequired is determined and an execution instruction is generated and sent to the brain unit corresponding to the production line personnel, so that the brain unit completes the corresponding businesscontent according to the execution instruction. When it is detected that the brain unit has not completed the business content, the corresponding operation required by the superior personnel of the production line personnel is determined and a new execution instruction is generated and sent to the brain unit corresponding to the superior personnel, so that the brain unit completes the business content. By that analogy, exe