Lift pin unit and substrate supporting unit employing same

The invention provides a lift pin unit and a substrate supporting unit employing same. Provided is a substrate supporting unit. The substrate supporting unit includes a susceptor supporting the substrate and having a pin hole vertically formed therein, a lift pin provided to move up and down along the pin hole, a support plate supporting the lift pin, and a driving unit vertically moving the support plate. The lift pin has a first magnetic substance formed at a lower end thereof. The support plate has a second magnetic substance provided thereon and having an opposite polarity to a polarity ofthe first magnetic substance. 提供了种提升销单元和具有同样的提升销单元的基板支承单元。提供了种基板支承单元。所述基板支承单元包括：基座，其支承所述基板并且具有垂直形成于其中的销孔；提升销，其设置成沿所述销孔上下移动；支承板，其支承所述销孔；以及，驱动单元，其垂直地移动所述支承板。所述提升销具有在其下端形成的第磁性体。所述支承板具有在其上设置的第二磁性体并且所述第二磁性体具有与第磁性体的极性相反的极性。