Integrated unpacking and cleaning system for exposure photomasks

The invention discloses an integrated unpacking and cleaning system for exposure photomasks. The system comprises an unpacking mechanical arm, a temporary storage device, a turning examination deviceand a transmission device. The transmission device is used for conveying the exposure photomasks with covers to an operating area of the unpacking mechanical arm; the unpacking mechanical arm clamps the covers and puts the covers on the temporary storage device; the transmission device continues to convey the unpacked exposure photomasks to an operating area in butt joint with the turning examination device; the turning examination device clamps the unpacked exposure photomasks to turn in different angles to realize multi-angle cleaning of the unpacked exposure photomasks. By implementation ofthe integrated unpacking and cleaning system for the exposure photomasks, unpacking, conveying and cleaning of the exposure photomasks are integrated, space saving is realized, intelligent manufacturing demands are met, produ