Purge device of load port and purge method thereof

A purging device of a load port includes an intake module, an exhausting module, a first purge gas supplying module, a second purge gas supplying module, an intake control valve and a processing module. The first purge gas supplying module is configured to provide a first cleaning gas. The second pu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG WANANG, LIN KUAN-TING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CLEANING CLEANING IN GENERAL PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL TRANSPORTING
Online-Zugang:	Volltext bestellen
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