Purge device of load port and purge method thereof

A purging device of a load port includes an intake module, an exhausting module, a first purge gas supplying module, a second purge gas supplying module, an intake control valve and a processing module. The first purge gas supplying module is configured to provide a first cleaning gas. The second purge gas supplying module is configured to provide a second cleaning gas. The intake control valve isdisposed between the first and second purge gas supplying modules and the intake module, and the intake control valve is configured to respectively control the circulation or blockage of the first and second purge gas supplying modules. The processing module is electrically connected to the control valve, and is operable so as to control the control valve to allow flow of a first purge gas from the first purge gas supplying module into the intake module, while preventing flow of a second purge gas from the second purge gas supplying module into the intake module, or allow flow of the second purge gas from the second