Stress detection device and stress detection matrix system
The invention discloses a stress detection device and a stress detection matrix system. The stress detection device comprises a silicon substrate and a detection assembly, the silicon substrate is provided with a groove, and the detection assembly comprises a flexible substrate, a 2D layered materia...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a stress detection device and a stress detection matrix system. The stress detection device comprises a silicon substrate and a detection assembly, the silicon substrate is provided with a groove, and the detection assembly comprises a flexible substrate, a 2D layered material sheet and a detection circuit; the 2D layered material sheet is arranged in the surface of the flexible substrate, applied to the surface of the silicon substrate, and combined with the groove to form a cavity; and the two sides of the groove are provided with electrodes electrically connected with the detection circuit. The stress detection device can indirectly measure the magnitude of an external stress by measuring change of electric signals in the 2D layered material sheet, and a measuring result is higher in accuracy. The device is simpler in structure, the sizes of the silicon substrate and the detection assembly can be selected according to demands, and the device can be also applied to stress measurement |
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