Vacuum sealed valve leakage rate test system and method

The invention provides a vacuum sealed valve leakage rate test system and method. The system consists of a first vacuum pump set and a second vacuum pump set, a leak detector, a vacuum chamber, a vacuum valve test cover, a pressure gauge, a standard leak hole, vacuum gauges, a gas source, and a firs...

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Bibliographische Detailangaben
Hauptverfasser:	YANG CHUANSEN, BAI XIANGCHUN, LU YAOWEN, CHEN AQIN, DONG YUNNING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	The invention provides a vacuum sealed valve leakage rate test system and method. The system consists of a first vacuum pump set and a second vacuum pump set, a leak detector, a vacuum chamber, a vacuum valve test cover, a pressure gauge, a standard leak hole, vacuum gauges, a gas source, and a first vacuum valve, a second vacuum valve, a third vacuum valve, a fourth vacuum valve, a fifth vacuum valve, a sixth vacuum valve, and a seventh vacuum valve, wherein the first vacuum pump set is connected to the vacuum chamber through the first vacuum valve, and the leak detector is connected to the vacuum chamber through the second vacuum valve. The vacuum chamber is connected to one ends of the vacuum gauges, the third vacuum valve and the fifth vacuum valve respectively. The other end of the fifth vacuum valve is connected to the standard leak hole. A tested vacuum valve is installed in the vacuum valve test cover, one end of the tested vacuum valve is connected to the other end of the third vacuum valve, and the