A novel wideband silicon-based SIW circulator

The invention discloses a novel wideband silicon-based SIW circulator, comprising a cavity horizontally arranged, a rotating ferrite substrate located at the center of the cavity, a permanent magnet,a surface circuit, three electromagnetic wave signal transmission channels formed by a plurality of metallized through holes and three output ports, wherein the cavity is made of silicon-based material; and the three groups of blind holes are respectively arranged in three electromagnetic wave signal transmission channels, the blind holes extend upward from the lower surface of the cavity, the blind holes are filled with metal cylinders, and the metal cylinders, the rotary ferrite substrate and the surface circuits are integrally matched with the electromagnetic wave impedance. The invention solves the problem that the matching effect of the surface circuit of the traditional SIW device is limited, and the introduction of the silicon-based material enables various advanced processes to beflexibly applied in the ma