ACCRETION COLLECTING DEVICE AND INSPECTION SYSTEM

In order to detach substances stably from an object being inspected, this accretion collecting device is characterized in including: ejection openings (n) which eject gas; a housing (B) in which the ejection openings (n) are provided; and supporting portions (H) which are installed on a surface of t...

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Bibliographische Detailangaben
Hauptverfasser: SUGIYAMA MASUYUKI, NAMAI MAKOTO, ITOU TAKAHIRO, NAGANO HISASHI, KUMANO SHUN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Zusammenfassung:In order to detach substances stably from an object being inspected, this accretion collecting device is characterized in including: ejection openings (n) which eject gas; a housing (B) in which the ejection openings (n) are provided; and supporting portions (H) which are installed on a surface of the housing (B) in which the ejection openings (n) are provided, and which have a prescribed height.Further, the supporting portions (H) are characterized in comprising protrusion-shaped portions formed in the housing (B). In addition, the supporting portions (H) have a cuboid shape, and are installed in such a way that the distance therebetween decreases in the direction of a recovery opening which recovers substances that have been detached from the object being inspected (C) by the gas. 为了稳定地从检查对象物剥离物质,其特征在于,具有喷出气体的喷出口(n)、具有喷出口(n)的箱体(B)、以及设置于箱体(B)的具备喷出口(n)的面且具有预定高度的支撑部(H)。并且,其特征在于,支撑部(H)是形成于箱体(B)的凸形状部。另外,其特征在于,支撑部(H)具有长方体形状,并且设置为随着朝向回收因气体而从检查对象物(C)剥离出的物质的回收口的方向,彼此距离变短。