Laser-assisted zinc oxide growth device and method based on lithium niobate wafer

The invention provides a laser-assisted zinc oxide growth device and method based on a lithium niobate wafer. The device comprises a laser 1, a convex lens 2, a copper container 3, a resistance heating rod 4, a temperature controller 5, a polytetrafluoroethylene container 6, a thermoelectric couple...

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Hauptverfasser: REN MANYI, YAN WENBO, LIANG CHAO, ZAN ZHITAO, LI FEIFEI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides a laser-assisted zinc oxide growth device and method based on a lithium niobate wafer. The device comprises a laser 1, a convex lens 2, a copper container 3, a resistance heating rod 4, a temperature controller 5, a polytetrafluoroethylene container 6, a thermoelectric couple 7 and the lithium niobate wafer 8. The device mainly comprises a focusing light path, the polytetrafluoroethylene container and a temperature control system, the focusing laser irradiates the lithium niobate wafer to generate photovoltaic effect, and zinc oxide is grown in special area of the lithium niobate wafer by combining a chemical synthesis method. According to the method, zinc oxide growth time is shortened, growth positions can be accurately adjusted, and rod-shaped zinc oxide with different diameters can be acquired by controlling power of lasers. 本发明提供种基于铌酸锂晶片的激光辅助氧化锌生长的装置及方法,该装置包括激光器1、凸透镜2、铜质容器3、电阻加热棒4、温度控制器5、聚四氟乙烯容器6、热电偶7、铌酸锂晶片8。本发明装置主要由聚焦光路、聚四氟乙烯容器、温控系统三部分组成,利用聚焦激光照射铌酸锂晶片产生光生伏打效应,同时结合化学合成的方法,实现铌酸锂晶片上特