Feeding and discharging device for integrated circuit material surface treatment equipment
The invention relates to a feeding and discharging device for integrated circuit material surface treatment equipment. The feeding and discharging device comprises a support, a first feeding device, afirst lifting device, a material pushing device and a feeding conveying device. The support is provi...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to a feeding and discharging device for integrated circuit material surface treatment equipment. The feeding and discharging device comprises a support, a first feeding device, afirst lifting device, a material pushing device and a feeding conveying device. The support is provided with a material placing port. The first feeding device is arranged on the support and corresponds to the material placing port, and accordingly, a material box placed in from the material placing port and provided with workpieces is conveyed. The first lifting device is arranged on the supportand located at one end of the first feeding device so as to bear and drive the material box conveyed through the first feeding device to ascend and descend. The material pushing device is arranged atthe rear end of the first lifting device and corresponds to the first lifting device, and accordingly the workpieces in the material box are pushed to the feeding conveying device. The feeding conveying device is arranged at th |
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