DRILLING PROCESSING DEVICE AND DRILLING PROCESSING METHOD

An object of the present invention is to improve productivity by minimizing the time required for movement of a gas cut in drilling a substrate by means of a drill bit. The device is provided with anupper surface height detection unit and a spindle drive control unit, the upper surface height detecting section detects the height of the upper surface of each of the machined positions of the objectto be machined at the time of machining the machined position, the spindle drive control unit is capable of switching the feeding speed of the main axis of the drill bit in the machining direction during the machining process. The spindle drive control section controls to reduce the feeding speed if the height of the drill bit during machining reaches the sum of a height of a predetermined heightand the height of the upper surface detected by the upper surface height detection section at the time of previous machining. 本发明的目的在于，在借助钻头对基板进行加工的钻孔加工中，尽量缩小在气割的移动所要的时间来使生产率提高。本发明具备上表面高度检测部和主轴驱动控制部，前述上表面高度检测部在加工位置的加工时检测被加工物的各