METHOD FOR ADDING A GRAPHENE-BASED ADDITIVE TO TARGET MATERIAL USED IN THE COATING APPLYING LASER ABLATION
In the present invention there is presented a manufacturing method for producing target material pieces (17) which are used in a laser ablation process and which make possible a more efficient coatingprocess by blending an additive suspension (12, 13) prepared in a special way with a powder (11) use...
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Sprache: | chi ; eng |
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Zusammenfassung: | In the present invention there is presented a manufacturing method for producing target material pieces (17) which are used in a laser ablation process and which make possible a more efficient coatingprocess by blending an additive suspension (12, 13) prepared in a special way with a powder (11) used as the raw material for the target material. The suspension (14) consisting of the additive (12),raw materials (11) and liquid (13) is heated and after this sintered so that a solid target material piece (17) is produced. The piece (17) produced in this way can advantageously be used as a targetin the laser ablation process.
在本发明中提出了通过如下制造用于激光烧蚀过程中并且使得更高效的涂布过程成为可能的靶材部件(17)的制造方法:将以特别的方式制备的添加剂悬浮液(12,13)与作为用于所述靶材的原材料的粉末(11)共混。将由添加剂(12)、原材料(11)和液体(13)构成的悬浮液(14)加热并且在这之后烧结,使得产生实心靶材部件(17)。以此方式制造的部件(17)可有利地用作激光烧蚀过程中的靶。 |
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