OXIDE SINTERED BODY, SPUTTERING TARGET, AND METHODS FOR MAKING SAME

An oxide sintered body that includes 50 to 500 ppm of zirconium, and satisfies formulas (1) to (3) when the percentages (atom%) of contents of zinc, indium, gallium, and tin with respect to all metalelements excluding oxygen are, respectively, [Zn], [In], [Ga], and [Sn]. 35 atom%

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Bibliographische Detailangaben
Hauptverfasser: HATA HIDEO, NAKANE YASUO, TAO YUKI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:An oxide sintered body that includes 50 to 500 ppm of zirconium, and satisfies formulas (1) to (3) when the percentages (atom%) of contents of zinc, indium, gallium, and tin with respect to all metalelements excluding oxygen are, respectively, [Zn], [In], [Ga], and [Sn]. 35 atom%