OXIDE SINTERED BODY, SPUTTERING TARGET, AND METHODS FOR MAKING SAME
An oxide sintered body that includes 50 to 500 ppm of zirconium, and satisfies formulas (1) to (3) when the percentages (atom%) of contents of zinc, indium, gallium, and tin with respect to all metalelements excluding oxygen are, respectively, [Zn], [In], [Ga], and [Sn]. 35 atom%
Gespeichert in:
Hauptverfasser: | , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | An oxide sintered body that includes 50 to 500 ppm of zirconium, and satisfies formulas (1) to (3) when the percentages (atom%) of contents of zinc, indium, gallium, and tin with respect to all metalelements excluding oxygen are, respectively, [Zn], [In], [Ga], and [Sn]. 35 atom% |
---|