OZONE GAS CONCENTRATION METHOD AND OZONE GAS CONCENTRATION DEVICE

Provided are an ozone gas concentration method and an ozone gas concentration device (1) using same, said ozone gas concentration method comprising: a step in which a mixed raw material gas containingozone gas is guided inside an adsorption vessel (20) holding an adsorption agent that adsorbs ozone and the adsorption agent is caused to adsorb the ozone gas; a step in which the interior of a concentration vessel (30), connected to the adsorption vessel (20) so as to be switchable between communicating and not communicating with the adsorption vessel, is depressurized in a state in which same is not communicating with the absorption vessel; and a step in which a concentrated mixed gas having a higher ozone gas concentration than the mixed raw material gas is introduced into the concentration vessel (30) by switching, to a communicated state, the concentration vessel (30) having the interior thereof depressurized and the adsorption vessel (20) holding the adsorption agent that has adsorbed the ozone gas, desorbi