MAGNETIC MEMORY DEVICE AND METHOD OF FABRICATING THE SAME

Disclosed are a magnetic memory device and a method of fabricating the same. The magnetic memory device comprises a bottom electrode on a substrate, a magnetic tunnel junction pattern including a first magnetic layer, a tunnel barrier layer, and a second magnetic layer that are sequentially stacked...

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Bibliographische Detailangaben
Hauptverfasser: KILHO LEE, YOONJONG SONG, DAEEUN JEONG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Disclosed are a magnetic memory device and a method of fabricating the same. The magnetic memory device comprises a bottom electrode on a substrate, a magnetic tunnel junction pattern including a first magnetic layer, a tunnel barrier layer, and a second magnetic layer that are sequentially stacked on the bottom electrode, and a top electrode on the magnetic tunnel junction pattern. The bottom electrode comprises a first bottom electrode and a second bottom electrode on the first bottom electrode. Each of the first and second bottom electrodes comprises metal nitride. The first bottom electrode has a crystallinity higher than that of the second bottom electrode. 公开了种磁存储器件及其制造方法。该磁存储器件包括:底电极,在衬底上;磁隧道结图案,包括顺序地堆叠在底电极上的第磁性图案、隧道势垒图案和第二磁性图案;以及顶电极,在磁隧道结图案上。底电极包括第底电极和在第底电极上的第二底电极。第底电极和第二底电极中的每个包括金属氮化物。第底电极具有比第二底电极的结晶度高的结晶度。