Inorganic flexible transparent perovskite oxide voltage-controlled varactor and preparation method thereof

The invention discloses an inorganic flexible perovskite oxide voltage-controlled varactor and a preparation method thereof. The transparent flexible voltage-controlled varactor consists of a mica substrate, a fully transparent layered (Ag/ITO) n bottom electrode, a perovskite oxide film and a transparent ITO top electrode. The voltage-controlled varactor uses mica as the substrate and O2 as the sputtering gas, a sputtering deposition technology is utilized to deposite on the mica a (Ag/ITO) n bottom electrode of a thickness of 150 nm to 250 nm, the perovskite oxide film of a thickness of 200nm, and with the ITO top electrode of a thickness of 100 nm to 300 nm, thereby obtaining the inorganic flexible transparent perovskite oxide voltage-controlled varactor. The voltage-controlled varactor of the invention has excellent tuning rate and high light transmittance; and is flexible and bending-resistant, when the bending radius is 1.4 mm, the tuning rate is close to the numerical value ina flat state, and the vara