Mask aligner micro mirror array angular position monitoring apparatus and using method thereof

A mask aligner micro mirror array angular position monitoring apparatus, which is composed of a light source unit, a mirror unit, a micro mirror array fixing unit, an angular position conversion unit,and a position sensor unit. The light emitted from the light source unit is incident on the micro mirror array, which is reflected by the micro mirror array and then incident on the angular positionconversion unit and the position sensor unit in turn. The position sensor unit is located on the back focal plane or the image plane of the angular position conversion unit. According to the mask aligner micro mirror array angular position monitoring apparatus of the invention, the normal operation of the exposure system will not be interfered since the main optical path is not in the same direction as the working optical path of the mask aligner. The angular position information of the micro mirror array is monitored and fed back to the host computer in real time, so that the closed-loop control of the angular positio