Wafer gripper assembly, system and use thereof

The present invention discloses a wafer gripper assembly, a system and a use thereof. The wafer gripper assembly is provided with at least one wafer gripper (50) comprising a base (51) and a bridge element (52), vacuum means comprising a hose (53) for applying a negative pressure and at least one suction zone (54) adapted to hold a wafer (10) by means of the applied negative pressure, and a frame(60) coupled to the bridge element (52). The frame (60) is provided with positioning means (57) adapted to contact a wafer boat to position the wafer at a predefined distance from the wafer boat. An elastic connector (56) is provided between the frame (60) and either the bridge member (52) or a retaining plate (70) comprising the suction devices (54) when such a retaining plate is present. 本申请公开了晶圆夹持器组件、系统及其用途。晶圆夹持器组件设置有至少个晶圆夹持器(50)，该晶圆夹持器包括基座(51)和桥接元件(52)；真空装置，其包括用于施加负压的软管(53)和至少个抽吸区域(54)，被配置用于借助于所施加的负压保持晶圆(10)；框架(60)，其联接到桥接元件(52)。框架(60)设置有被配置用于接触晶圆舟的定位装置(57)，以便将晶圆定位在距晶圆舟的预定距离处。在框架(60)与桥接元件(52)或包括抽吸设备(54)的保持板(70)之间存在