Holographic focus-tracing optical contact-tag micrometer

The present invention discloses a holographic focus-tracing light contact-tag micrometer, including semiconductor laser (1), collimating lens (2), object glass (6), focus-tracing driver (11), driving circuit (16), integrator (15) and display (18). Its holographic tool edge element (5) is placed betw...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LU KEQIAN, ZHANG JIHUA, ZHUANG BAOHUA
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:The present invention discloses a holographic focus-tracing light contact-tag micrometer, including semiconductor laser (1), collimating lens (2), object glass (6), focus-tracing driver (11), driving circuit (16), integrator (15) and display (18). Its holographic tool edge element (5) is placed between collimating lens (2) and object glass (6), and two two-quadrant photoelectric receivers (8) and (9) are placed nearby the laser (1). The described photoelectric receivers (8) and (9) are connected with a signal processor (14), and a non-linear corrector is respectively connected with the integrator (15) and display (18). Said invention is simple in structure, low in cost, and its measurement range is extensive, resolution and accuracy are high, so that it can be extensively used for non-contacting micrometering.