A lithographic pupil calibrator and a use method thereof

A lithographic pupil calibrator and a use method thereof are disclosed. The calibrator comprises a filter element and an actuator element, each actuator element bee combined with at least one filter element, that filter element bee foldable and moving in multiple dimensions within a pupil plane by m...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHANG FANG, MA XIAOZHE, ZHU SIYU, ZENG ZONGSHUN, ZENG AIJUN, CHENG WEILIN, HUANG HUIJIE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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