A lithographic pupil calibrator and a use method thereof

A lithographic pupil calibrator and a use method thereof are disclosed. The calibrator comprises a filter element and an actuator element, each actuator element bee combined with at least one filter element, that filter element bee foldable and moving in multiple dimensions within a pupil plane by means of the actuator element. The light filter element comprises a fixing mechanism, a traction mechanism, and a light blocking mechanism connected between the fixing mechanism and the traction mechanism, at least one of the fixing mechanism and the traction mechanism being combined with the actuating element. A method for use a pupil corrector of a photolithography machine of that present invention adjusts the position of the filter element in the pupil plane, changes the energy attenuation percentage, and corrects pupil characteristic parameters to a required range, thereby realizing the correction of pupil energy distribution balance. 种光刻机光瞳校正器及其使用方法，其构成包括滤光元件和致动元件，每个致动元件与至少个滤光元件相结合，所述的滤光元件是可折叠的，借助所述的致动元件在光瞳面内多维