A lithographic pupil calibrator and a use method thereof
A lithographic pupil calibrator and a use method thereof are disclosed. The calibrator comprises a filter element and an actuator element, each actuator element bee combined with at least one filter element, that filter element bee foldable and moving in multiple dimensions within a pupil plane by m...
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| creator | ZHANG FANG MA XIAOZHE ZHU SIYU ZENG ZONGSHUN ZENG AIJUN CHENG WEILIN HUANG HUIJIE |
| description | A lithographic pupil calibrator and a use method thereof are disclosed. The calibrator comprises a filter element and an actuator element, each actuator element bee combined with at least one filter element, that filter element bee foldable and moving in multiple dimensions within a pupil plane by means of the actuator element. The light filter element comprises a fixing mechanism, a traction mechanism, and a light blocking mechanism connected between the fixing mechanism and the traction mechanism, at least one of the fixing mechanism and the traction mechanism being combined with the actuating element. A method for use a pupil corrector of a photolithography machine of that present invention adjusts the position of the filter element in the pupil plane, changes the energy attenuation percentage, and corrects pupil characteristic parameters to a required range, thereby realizing the correction of pupil energy distribution balance.
种光刻机光瞳校正器及其使用方法，其构成包括滤光元件和致动元件，每个致动元件与至少个滤光元件相结合，所述的滤光元件是可折叠的，借助所述的致动元件在光瞳面内多维 |
| format | Patent |
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种光刻机光瞳校正器及其使用方法，其构成包括滤光元件和致动元件，每个致动元件与至少个滤光元件相结合，所述的滤光元件是可折叠的，借助所述的致动元件在光瞳面内多维</description><language>chi ; eng</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; CINEMATOGRAPHY ; ELECTROGRAPHY ; HOLOGRAPHY ; MATERIALS THEREFOR ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS</subject><creationdate>2018</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20181211&DB=EPODOC&CC=CN&NR=108983559A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20181211&DB=EPODOC&CC=CN&NR=108983559A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ZHANG FANG</creatorcontrib><creatorcontrib>MA XIAOZHE</creatorcontrib><creatorcontrib>ZHU SIYU</creatorcontrib><creatorcontrib>ZENG ZONGSHUN</creatorcontrib><creatorcontrib>ZENG AIJUN</creatorcontrib><creatorcontrib>CHENG WEILIN</creatorcontrib><creatorcontrib>HUANG HUIJIE</creatorcontrib><title>A lithographic pupil calibrator and a use method thereof</title><description>A lithographic pupil calibrator and a use method thereof are disclosed. The calibrator comprises a filter element and an actuator element, each actuator element bee combined with at least one filter element, that filter element bee foldable and moving in multiple dimensions within a pupil plane by means of the actuator element. The light filter element comprises a fixing mechanism, a traction mechanism, and a light blocking mechanism connected between the fixing mechanism and the traction mechanism, at least one of the fixing mechanism and the traction mechanism being combined with the actuating element. A method for use a pupil corrector of a photolithography machine of that present invention adjusts the position of the filter element in the pupil plane, changes the energy attenuation percentage, and corrects pupil characteristic parameters to a required range, thereby realizing the correction of pupil energy distribution balance.
种光刻机光瞳校正器及其使用方法，其构成包括滤光元件和致动元件，每个致动元件与至少个滤光元件相结合，所述的滤光元件是可折叠的，借助所述的致动元件在光瞳面内多维</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>CINEMATOGRAPHY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>MATERIALS THEREFOR</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2018</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLBwVMjJLMnITy9KLMjITFYoKC3IzFFITszJTCpKLMkvUkjMS1FIVCgtTlXITQWqS1EoyUgtSs1P42FgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8c5-hgYWlhbGpqaWjsbEqAEA57wuGg</recordid><startdate>20181211</startdate><enddate>20181211</enddate><creator>ZHANG FANG</creator><creator>MA XIAOZHE</creator><creator>ZHU SIYU</creator><creator>ZENG ZONGSHUN</creator><creator>ZENG AIJUN</creator><creator>CHENG WEILIN</creator><creator>HUANG HUIJIE</creator><scope>EVB</scope></search><sort><creationdate>20181211</creationdate><title>A lithographic pupil calibrator and a use method thereof</title><author>ZHANG FANG ; MA XIAOZHE ; ZHU SIYU ; ZENG ZONGSHUN ; ZENG AIJUN ; CHENG WEILIN ; HUANG HUIJIE</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN108983559A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2018</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>CINEMATOGRAPHY</topic><topic>ELECTROGRAPHY</topic><topic>HOLOGRAPHY</topic><topic>MATERIALS THEREFOR</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><toplevel>online_resources</toplevel><creatorcontrib>ZHANG FANG</creatorcontrib><creatorcontrib>MA XIAOZHE</creatorcontrib><creatorcontrib>ZHU SIYU</creatorcontrib><creatorcontrib>ZENG ZONGSHUN</creatorcontrib><creatorcontrib>ZENG AIJUN</creatorcontrib><creatorcontrib>CHENG WEILIN</creatorcontrib><creatorcontrib>HUANG HUIJIE</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>ZHANG FANG</au><au>MA XIAOZHE</au><au>ZHU SIYU</au><au>ZENG ZONGSHUN</au><au>ZENG AIJUN</au><au>CHENG WEILIN</au><au>HUANG HUIJIE</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>A lithographic pupil calibrator and a use method thereof</title><date>2018-12-11</date><risdate>2018</risdate><abstract>A lithographic pupil calibrator and a use method thereof are disclosed. The calibrator comprises a filter element and an actuator element, each actuator element bee combined with at least one filter element, that filter element bee foldable and moving in multiple dimensions within a pupil plane by means of the actuator element. The light filter element comprises a fixing mechanism, a traction mechanism, and a light blocking mechanism connected between the fixing mechanism and the traction mechanism, at least one of the fixing mechanism and the traction mechanism being combined with the actuating element. A method for use a pupil corrector of a photolithography machine of that present invention adjusts the position of the filter element in the pupil plane, changes the energy attenuation percentage, and corrects pupil characteristic parameters to a required range, thereby realizing the correction of pupil energy distribution balance.
种光刻机光瞳校正器及其使用方法，其构成包括滤光元件和致动元件，每个致动元件与至少个滤光元件相结合，所述的滤光元件是可折叠的，借助所述的致动元件在光瞳面内多维</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
| title | A lithographic pupil calibrator and a use method thereof |
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