Single-piece conveying double-piece basket feeding system and method in silicon wafer automatic conveying system

The invention discloses a single-piece conveying double-piece basket feeding system and method in a silicon wafer automatic conveying system, and the problem of insertion of two sheets in a basket tool in single silicon chip conveying on an automatic production line is solved. A silicon wafer insert...

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Bibliographische Detailangaben
Hauptverfasser: XIAO FANGSHENG, JIANG ZHIYAN, YUE JUN, ZHANG QIWEI, DU HUMING
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a single-piece conveying double-piece basket feeding system and method in a silicon wafer automatic conveying system, and the problem of insertion of two sheets in a basket tool in single silicon chip conveying on an automatic production line is solved. A silicon wafer inserting and conveying mechanism (6) is arranged on the working table surface of an equipment bracket (1)between a silicon wafer conveying mechanism (5) and a basket lifting mechanism (4); a conveying belt (13) is arranged on a silicon wafer inserting cantilever plate (17), and conveying of the siliconwafer (18) is realized by the conveying belt (13) under the control of a conveying motor (12); an insertion movable bracket control air cylinder (15) is arranged on the equipment bracket (1); the output shaft of the insertion movable bracket control air cylinder (15) is connected with a silicon wafer insertion sliding plate bracket (14) together; and a silicon wafer basket feeding sensor (21) anda silicon wafer basket feed