Electrostatic driving micromotor device based on micro beam vibration
The invention discloses an electrostatic driving micromotor device based on micro beam vibration. The electrostatic driving micromotor device is composed of three parts of a micro beam electrostatic driving system, a power output system and a motor starting and stopping system, wherein the electrost...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses an electrostatic driving micromotor device based on micro beam vibration. The electrostatic driving micromotor device is composed of three parts of a micro beam electrostatic driving system, a power output system and a motor starting and stopping system, wherein the electrostatic driving device is composed of a fixed end, a power switch, a direct-current power supply, an upper electrode plate, an upper electrode plate contact spring, an upper electrode, a micro beam, a lower electrode, a lower electrode plate contact spring and a lower electrode plate; the power outputsystem is composed of a mass block, a mass block hinge, an inertia wheel hinge, a connection rod, a connection rod hinge and an inertia wheel; the motor starting and stopping system is composed of anelectromagnet, a mass block and a micro beam, and the electromagnet is arranged right under the mass block; an electrostatic motor can do periodical repeated motion to drive the inertia wheel to rotate; by means of vibrating t |
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