Solar cell with selectively doped conductive oxide layer and method of making the same

The invention provides a solar cell with selectively doped conductive oxide layer and a method of making the same. According to the invention, a method of making a coated substrate having a transparent conductive oxide layer with a dopant selectively distributed in the layer includes selectively supplying an oxide precursor material and a dopant precursor material to each coating cell of a multi-cell chemical vapor deposition coater, wherein the amount of dopant material supplied is selected to vary the dopant content versus coating depth in the resultant coating. 本发明涉及种具有经选择性掺杂导电氧化物层的太阳能电池及其制备方法。制备经涂覆基板的方法，该基板具有透明导电氧化物层且掺杂物选择性分布于该层中，该方法包括将氧化物前体材料和掺杂物前体材料选择性供应至多单元化学气相沉积涂覆机的各涂覆单元，其中选择所供应掺杂物材料的量以改变所得涂层中掺杂物含量对涂层深度。