While-drilling torque sensor and torque measuring method
The invention relates to a torque sensor and a torque measuring method, belonging to the technical field of drilling, and specifically relates to a while-drilling torque sensor and a torque measuringmethod. The while-drilling torque sensor includes a torque strain measuring body, wherein the torque...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to a torque sensor and a torque measuring method, belonging to the technical field of drilling, and specifically relates to a while-drilling torque sensor and a torque measuringmethod. The while-drilling torque sensor includes a torque strain measuring body, wherein the torque strain measuring body includes: a silicon crystal film; two ends of the silicon crystal film are each provided with a P-type semiconductor formed by doping of trivalent element boron by using an ion implantation process; and the middle portion of the silicon crystal film is equipped with a parasitic capacitor and an N-type semiconductor formed by doping of the valence element phosphorus by using the ion implantation process. The while-drilling torque sensor and the torque measuring method can measure the torque pressure according to the equivalent resistance change caused by the change of the width of a current channel formed inside the doped silicon crystal under the action of the torque,and have the characteristi |
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