TRENCH-BASED MICROELECTROMECHANICAL TRANSDUCER AND METHOD FOR MANUFACTURING THE MICROELECTROMECHANICAL TRANSDUCER

The disclosure relates to a trench-based microelectromechanical transducer and a method for manufacturing the microelectromechanical transducer. For example, a microelectromechanical transducer includes: a semiconductor body, having a first surface and a second surface opposite to one another; a fir...

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Bibliographische Detailangaben

Hauptverfasser:	POMARICO ANNA ANGELA, ROSELLI GIUDITTA, CALTABIANO DANIELE, ABBASI GAVARTI MOHAMMAD
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ELECTRICITY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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