Method and apparatus for room temperature bonding substrates

A particle micro/nanoparticle filled paste (10) is employed to create an absorbing/sintering interlayer (65) for a bonding process which avoids the need to grind/polish large substrates (11, 12) and eliminates the need for more expensive sputtering process. 使用种颗粒微米/纳米颗粒填充糊剂(10)来形成吸收/烧结中间层(65)以用于结合工艺...

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Bibliographische Detailangaben
Hauptverfasser: LAFLEUR ROCCO, KARAM RAYMOND M, HOBDEN ROB
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A particle micro/nanoparticle filled paste (10) is employed to create an absorbing/sintering interlayer (65) for a bonding process which avoids the need to grind/polish large substrates (11, 12) and eliminates the need for more expensive sputtering process. 使用种颗粒微米/纳米颗粒填充糊剂(10)来形成吸收/烧结中间层(65)以用于结合工艺,该结合工艺不需要研磨/抛光大型基材(11、12),并且免除了对更为昂贵的溅射工艺的需要。