Scanning electron microscope sample bracket used for vacuum interconnection

The invention relates to the field of vacuum machines, in particular to a scanning electron microscope sample bracket used for vacuum interconnection, and used for solving the problems of loading andfixation of a scanning electron microscope wafer sample (wafter) under the vacuum interconnection condition. The sample bracket is of a three-layer structure, a top layer is composed of a sample tray(5), sample pressure springs (3) distributed at equal intervals, corresponding radial push rods (2), radial push rod fixing bases (4), a center rotary cam (1), a bearing (7) and a sample tray connecting base (6) bottom layer of a circular structure preferentially; and an interlayer is one spring prestressed layer, and a lower layer is one sample bracket mounting interface (9) in interference fit with a center shaft of the center rotary cam (1). The sample tray (5) at the top layer is fixed, the sample bracket mounting interface (9) at the bottom layer is rotated, and the center rotary cam (1)can be driven to push away