Surface-enhanced Raman optical fluid chip based on long-range plasma waveguide
The invention relates to a surface-enhanced Raman optical fluid chip based on a long-range plasma waveguide, the surface-enhanced Raman optical fluid chip comprises a coupling grating (1), a dielectric waveguide, a surface plasma waveguide, a microfluidic structure and a silicon substrate (2); the d...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to a surface-enhanced Raman optical fluid chip based on a long-range plasma waveguide, the surface-enhanced Raman optical fluid chip comprises a coupling grating (1), a dielectric waveguide, a surface plasma waveguide, a microfluidic structure and a silicon substrate (2); the dielectric waveguide comprises a waveguide upper-cladding layer (3), a waveguide lower-cladding layer(4) and a waveguide core layer (5); the waveguide upper-cladding layer (3) is disposed on the upper surface of the waveguide core layer (5), the coupling grating (1) is distributed on the upper surface of the waveguide core layer (5), the coupling grating (1) is not in contact with the waveguide upper-cladding layer (3); the outer surfaces of the silicon substrate (2), the waveguide lower cladding layer (4) and the waveguide core layer (5) are flush, and the outer surfaces of the waveguide upper-cladding layer (3), a surface plasma waveguide core layer (9) and a microfluidic channel (8) are flush. The surface-enhance |
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