Laser spot shaping device and method thereof

The invention discloses a laser spot shaping device and method. The device comprises a binary optical element for converting a spot shape, an electric translation stage for controlling the movement ofthe binary optical element, and a Galilean telescope structure for shaping spots. The binary optical...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHEN HUAN, JIA TIANDAI, FENG AIXIN, SHANG DAZHI, LIU YONG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a laser spot shaping device and method. The device comprises a binary optical element for converting a spot shape, an electric translation stage for controlling the movement ofthe binary optical element, and a Galilean telescope structure for shaping spots. The binary optical element is fixed to the electric translation stage. The Galileo telescope structure includes a concave lens and a convex lens that are arranged on the same center line. The movement of the electric translation stage is controlled in order to move the binary optical element to a position where thebinary optical element coincides with the center of the Galileo telescope structure, thereby realizing the output of a square spot. The movement of the electric translation stage is controlled in order to move the binary optical element from the position where the binary optical element coincides with the center of the Galileo telescope structure, thereby realizing the output of a circular spot. By spot shaping, the input