CHARGED PARTICLE BEAM APPARATUS

Disclosed herein is a charged particle beam apparatus. The apparatus includes a charged particle beam column irradiating a sample with a charged particle beam, a sample stage unit including a rotary stage section (5A) having a base portion (5d) and a rotary mover rotating about a rotary axis (R1) relative to the base portion (5d), a rotary connector (56) placed coaxially with the rotary axis (R1)and fitted between the base portion (5d) and the rotary mover, and a contact pin (55a) disposed on the sample stage unit in electrical connection with the rotary connector (56). In the charged particle beam apparatus, the sample is able to be rapidly placed and replaced. 本发明提供带电粒子束装置，其能够迅速地进行试样的配置和更换。该带电粒子束装置具有：带电粒子束镜筒，其向试样照射带电粒子束；试样载台，其包含具有基座部(5d)和相对于基座部(5d)绕旋转轴线(R1)旋转的旋转移动部的旋转载台(5A)，使试样相对于带电粒子束镜筒移动；旋转连接器(56)，其与旋转轴线(R1)同轴配置，插装在基座部(5d)与旋转移动部之间；以及接触引脚(55a)，其配置在试样载台的上部，与旋转连接器(56)电连接。