Measuring system for measuring an imaging quality of an EUV lens

A measuring system (10) for measuring an imaging quality of an EUV lens (30) comprises: a diffractive test structure (26), a measurement light radiating device (16) which is configured to radiate measurement light (21) in the EUV wavelength range onto the test structure, a variation device (28) for varying at least one image-determining parameter of an imaging of the test structure that is effected by means of a lens, a detector (14) for recording an image stack comprising a plurality of images generated with different image-determining parameters being set, and an evaluation device (15) whichis configured to determine the imaging quality of the lens from the image stack. 种用于测量EUV镜头(30)的成像质量的测量系统(10)，包括：衍射测试结构(26)；测量光辐射装置(16)，构造成将EUV波长范围中的测量光(21)辐射至测试结构；变更装置(28)，用于改变借助镜头实现的测试结构的成像的至少个像确定参数；探测器(14)，用于记录像堆，所述像堆包括在设定不同像确定参数的情况下产生的多个像；以及评估装置(15)，构造成从像堆确定镜头的成像质量。