Optical transmission type AR (augmented reality) glasses display chip and preparation method thereof

The invention provides an optical transmission type AR (augmented reality) glasses display chip and a preparation method thereof. A P-type epitaxial layer is etched according to designed pixel unit size on a blue-light or green-light LED epitaxial wafer with an LED layer growing on a sapphire substr...

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Hauptverfasser:	WAN JINPING, GAO HONGXIN, YU TIANBAO, LIU FANGJIAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SEMICONDUCTOR DEVICES
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creator	WAN JINPING GAO HONGXIN YU TIANBAO LIU FANGJIAO
description	The invention provides an optical transmission type AR (augmented reality) glasses display chip and a preparation method thereof. A P-type epitaxial layer is etched according to designed pixel unit size on a blue-light or green-light LED epitaxial wafer with an LED layer growing on a sapphire substrate, and PN junction independent LED pixels are formed; an N-type epitaxial layer of an epitaxial structure is etched downwards continuously, and electric isolation channels between rows in an LED display chip are formed; stealth cutting is performed in the isolation channels between rows, and a metamorphic zone in a laser beam direction is formed. A SiO2 or Si3O4 insulation diaphragm is deposited on the surface of the LED epitaxial wafer, and a through hole is machined in the top of each lightemitting pixel of the insulation diaphragm. An ITO layer is formed by evaporation, and an ITO conductive line is formed; light transmittance of ITO is increased, and an ITO film and the P-type LED epitaxial layer form ohmic c
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title	Optical transmission type AR (augmented reality) glasses display chip and preparation method thereof
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