Optical transmission type AR (augmented reality) glasses display chip and preparation method thereof
The invention provides an optical transmission type AR (augmented reality) glasses display chip and a preparation method thereof. A P-type epitaxial layer is etched according to designed pixel unit size on a blue-light or green-light LED epitaxial wafer with an LED layer growing on a sapphire substr...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides an optical transmission type AR (augmented reality) glasses display chip and a preparation method thereof. A P-type epitaxial layer is etched according to designed pixel unit size on a blue-light or green-light LED epitaxial wafer with an LED layer growing on a sapphire substrate, and PN junction independent LED pixels are formed; an N-type epitaxial layer of an epitaxial structure is etched downwards continuously, and electric isolation channels between rows in an LED display chip are formed; stealth cutting is performed in the isolation channels between rows, and a metamorphic zone in a laser beam direction is formed. A SiO2 or Si3O4 insulation diaphragm is deposited on the surface of the LED epitaxial wafer, and a through hole is machined in the top of each lightemitting pixel of the insulation diaphragm. An ITO layer is formed by evaporation, and an ITO conductive line is formed; light transmittance of ITO is increased, and an ITO film and the P-type LED epitaxial layer form ohmic c |
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