Semiconductor chip test probe card, testing system and testing method
The invention discloses a semiconductor chip test probe card. Probes required for the electrical testing of all types of chips on the same wafer are manufactured on the probe card. The invention alsodiscloses a semiconductor chip testing system using the probe card, a tested chip is connected throug...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a semiconductor chip test probe card. Probes required for the electrical testing of all types of chips on the same wafer are manufactured on the probe card. The invention alsodiscloses a semiconductor chip testing system using the probe card, a tested chip is connected through the probe card, a testing result is recorded as different types of failure messages, and the failures messages are output to corresponding storage servers according to the types of the failure messages. The invention also discloses a semiconductor chip testing method using the probe card. According to the testing system and the testing method disclosed by the invention, the manufacturing cost of the probe card is reduced, the probe card is avoided from being manufactured repeatedly, the totalproduction cost is reduced, and one all-in-one probe card corresponds to all chips on one wafer, so that the probe card is convenient to manage. The complete flow test of the chips can be competed once, so that the testing ef |
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