Air flotation precision motion platform

The invention discloses an air flotation precision motion platform. A vacuum adsorption platform is installed on a motion rail of a base, the vacuum adsorption platform is fixedly connected with a linear motor through a first transition plate, the linear motor is installed on the base, a built-in va...

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Hauptverfasser: KONG DEKUN, ZHANG XIAFENG, LUO SIXIN, WANG SUJUAN, WEI KERONG, GUO YAWEN, YAO JIANHUA, YIN ZIQIANG, LIN JIAN
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creator KONG DEKUN
ZHANG XIAFENG
LUO SIXIN
WANG SUJUAN
WEI KERONG
GUO YAWEN
YAO JIANHUA
YIN ZIQIANG
LIN JIAN
description The invention discloses an air flotation precision motion platform. A vacuum adsorption platform is installed on a motion rail of a base, the vacuum adsorption platform is fixedly connected with a linear motor through a first transition plate, the linear motor is installed on the base, a built-in vacuum generator is arranged in the vacuum adsorption platform, air flotation bearings are inlaid at the bottom and on the two sides of the vacuum adsorption platform, and an external vacuum generator is detachably connected with the vacuum adsorption platform. A first air channel and a second air channel are arranged in the vacuum adsorption platform, the first air channel communicates with the built-in vacuum generator and used for adsorbing workpieces, and the second air channel communicates with the external vacuum generator and the air flotation bearings and used for generating an air film between the vacuum adsorption platform and the base. The technical problem that the positioning andmotion accuracy of an exi
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subjects DRESSING OR CONDITIONING OF ABRADING SURFACES
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
TRANSPORTING
title Air flotation precision motion platform
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