Air flotation precision motion platform
The invention discloses an air flotation precision motion platform. A vacuum adsorption platform is installed on a motion rail of a base, the vacuum adsorption platform is fixedly connected with a linear motor through a first transition plate, the linear motor is installed on the base, a built-in va...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention discloses an air flotation precision motion platform. A vacuum adsorption platform is installed on a motion rail of a base, the vacuum adsorption platform is fixedly connected with a linear motor through a first transition plate, the linear motor is installed on the base, a built-in vacuum generator is arranged in the vacuum adsorption platform, air flotation bearings are inlaid at the bottom and on the two sides of the vacuum adsorption platform, and an external vacuum generator is detachably connected with the vacuum adsorption platform. A first air channel and a second air channel are arranged in the vacuum adsorption platform, the first air channel communicates with the built-in vacuum generator and used for adsorbing workpieces, and the second air channel communicates with the external vacuum generator and the air flotation bearings and used for generating an air film between the vacuum adsorption platform and the base. The technical problem that the positioning andmotion accuracy of an exi |
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