PROBE APPARATUS

A probe apparatus according to an exemplary embodiment of the present invention is a probe apparatus for pressing a probe onto an electrode with an optimum contact pressure in a state where the probeis aligned with the electrode; the probe apparatus comprises the following parts: a moving module configured to move toward a substrate; a probe module movably installed with respect to the moving module and having the probe in contact with the electrodes of the substrate; an image capture unit for picking up a probe image when the probe contacts the electrode of the substrate; and a control unitfor determining whether or not the probe is in contact with the electrode of the substrate based on the probe image captured by the image capture unit. 根据本发明的示例性实施例的探头设备可以在探针与电极彼此对齐的状态下以最佳的接触压力将探针压靠在电极上，并且探头设备可以包括：移动模块，其配置成朝向基板是可移动的；探头模块，其安装成相对于移动模块是可移动的，并且具有与基板的电极接触的探针；图像捕获单元，其在探针与基板的电极接触时捕获探针的图像；和控制单元，其基于由图像捕获单元捕获的探针的图像来确定探针是否与基板的电极接触。