Gas pumping and recycling device for wet process equipment

The invention relates to a gas pumping and recycling device for wet process equipment. The device comprises a box body and a fan. The box body is a rectangular cavity body, an air exhaust port is arranged on an upper surface of one side of the box body, and an air suction port and an air inlet are arranged at two sides of the box body. The air inlet is at one side of the air exhaust port. The upper part of the inner cavity of the box body is provided with a gas exchange tube which is fixedly installed in the box body in a curved way and communicates with the air exhaust port. A horizontally fixed spraying pipe is arranged under the gas exchange tube and is perpendicular to the gas exchange tube in the space. The bottom of a box body inner cavity is provided with multiple groups of horizontally arranged rolling slide rollers which are perpendicular to the spraying pipe in the space. A substrate for placing a product is horizontally placed on the rolling slide rollers. A fan is installedoutside the box body, an