Lossless and clean transferring method for high-precision large-caliber ultrathin elements

The invention discloses a lossless and clean transferring method for high-precision large-caliber ultrathin elements. The lossless and clean transferring method for the high-precision large-caliber ultrathin elements comprises the following steps of (S1) fixing elements; and after cleaning the eleme...

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Bibliographische Detailangaben
Hauptverfasser: LIAO PINSHENG, MAO WEIPING, LIU QINJIANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a lossless and clean transferring method for high-precision large-caliber ultrathin elements. The lossless and clean transferring method for the high-precision large-caliber ultrathin elements comprises the following steps of (S1) fixing elements; and after cleaning the elements, loading the elements into a special support frame in a dust-free plant, and fixing the elements; (S2) inspecting the elements: enabling the elements and the support frame to enter an inspection flow, and starting to package after the inspection is pass; and (S3) packaging and sealing the elements. According to the lossless and clean transferring method for the high-precision large-caliber ultrathin elements, after the elements are processed, the large-caliber ultrathin elements can be stored and transferred in a lossless and clean way, and the complete-flow lossless and clean close loop of the elements is realized during a process from discharging to loading. 本发明公开种高精度、大口径超薄元件无损、洁净转运方法,包括以下步骤:S1)元件的固定;元件洁净处理后,