Microstructure design method for capacitive pressure sensor with microstructure dielectric layer

The invention discloses a microstructure design method for a capacitive pressure sensor with a microstructure dielectric layer, and belongs to the field of flexible pressure sensors. By combination ofAbaqus capable of solving a complicated nonlinear problem and large-sized COMSOL Multiphysics, the microstructure design method simulates a capacitive response of a microstructured capacitive pressure sensor under the action of external voltage; a simulation result is basically matched with an experimental result; compared with a previous simulation result, the simulation result has substantiallyimproved accuracy. The shape and the size of the microstructure are designed by changing parameters such as the elastic modulus, the bottom edge length, the angle, the height and the size of the microstructure of the dielectric layer, so that an influence rule of all the parameters on the linearity and the sensitivity of the sensor is obtained, and a basis is provided for optimization of the microstructure of the sensor.