High-precision beam energy analysis slit device

The invention relates to a high-precision beam energy analysis slit device. The device is mainly composed of a vacuum system, two driving mechanisms, two insulating blocks and two graphite blocks, wherein the two driving mechanisms respectively drive the two graphite blocks to move horizontally and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHEN WEI, WANG ZHONGMING, QU ERYUAN, QIU MENGTONG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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