High-precision beam energy analysis slit device

The invention relates to a high-precision beam energy analysis slit device. The device is mainly composed of a vacuum system, two driving mechanisms, two insulating blocks and two graphite blocks, wherein the two driving mechanisms respectively drive the two graphite blocks to move horizontally and enable the two graphite blocks to form a beam slit in the vertical beam direction so as to limit thetransverse size of the beam. The graphite blocks are connected with signal lines, and the beam loss at the slit can be obtained through measuring current signals on the graphite blocks. The width ofthe energy analysis slit can be adjusted, and accurate selection of energy can be realized through adjusting the width of two energy analysis slits in a beam energy analysis system. The high-precisionbeam energy analysis slit device is simple in structure, and can also perform measurement on the beam loss while realizing accurate adjustment for the slit width. 本发明涉及种高精度束流能量分析狭缝装置，该装置主要由套真空系统、两套驱动机构、两个绝缘块和两个石墨块组成。两套驱动机构分别带动