VIBRATION ISOLATION SYSTEM AND LITHOGRAPHIC APPARATUS

The invention relates to a vibration isolation system (VIS) comprising: a base (10); a coupling element (20) to be coupled to a vibration sensitive object; a vibration isolator (30-34) arranged between the base and the coupling element; a bellows (50) to be arranged between the coupling element or t...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	OOSTVEEN RICHARDUS SIMON ANTONIUS, OUDE NIJHUIS MARCO HENDRIKUS HERMANUS, SEIJGER OLAV JOHANNES, VAN LANKVELT ALEXANDER PETRUS JOSEPHUS, KERP INGMAR AUGUST, RIJS ROBERTUS MATHIJS GERARDUS, STEENHOEK ALEXANDER MAURICE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BLASTING CINEMATOGRAPHY CYLINDERS ELECTROGRAPHY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING HOLOGRAPHY LIGHTING MATERIALS THEREFOR MEANS FOR DAMPING VIBRATION MECHANICAL ENGINEERING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PISTONS SEALINGS SHOCK-ABSORBERS SPRINGS THERMAL INSULATION IN GENERAL WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The invention relates to a vibration isolation system (VIS) comprising: a base (10); a coupling element (20) to be coupled to a vibration sensitive object; a vibration isolator (30-34) arranged between the base and the coupling element; a bellows (50) to be arranged between the coupling element or the vibration isolator and a protective housing (40) surrounding the vibration sensitive object; andone or more separate damping elements to act on convolutions of the bellow. 本发明涉及种振动隔离系统(VIS)，该振动隔离系统包括：基座(10)；用于联接到振动敏感物体的联接元件(20)；布置在基座与联接元件之间的振动隔离器(30-34)；用于布置在联接元件或振动隔离器与包围振动敏感物体的保护壳体(40)之间的波纹管(50)；和作用在波纹管的回旋上的个或更多个分离开的阻尼元件。